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- Aluminum Chuck (MPA series)
Display Components
Aluminum Chuck (MPA series)
- Features
- We provide service of AL chuck overhual. (renewed and repair, re-Anodizing)
- Solve Flatness issue.
- Improve the mura issue and ESD problem.
- We can also provide New AL chuck part.
Description
1. Application1). Stepper Chuck provide area to place glass of exposure process during Lithography process in LCD manufactuing processes.
2). Stepper Chuck is a core part to support the glass and play a role of anti-reflection plate to inhibit the secondary exposure by the transmitted light.
2. Material
Aluminum + Anodizing + Dyeing + Surface Grinding
3. Specification
2). Canon MAP series.